TY  - BOOK
AU  - Mark J. Jackson
TI  - Microfabrication and Nanomanufacturing
SN  - 0-8247-2431-3
U1  - 621.9 
PY  - 2006///
CY  - Boca Raton
PB  - Taylor and Francis
N1  - Mark J. Jackson: Microfabrication and Nanomanufacturing.  Boca Raton.  Taylor and Francis, 2006. 0-8247-2431-3--(621.9JAC)
ER  -