| 000 | 00559nam a2200181Ia 4500 | ||
|---|---|---|---|
| 005 | 20241120201636.0 | ||
| 008 | 241119s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a0-8247-2431-3 | ||
| 041 | _aENG | ||
| 082 |
_a621.9 _bJAC |
||
| 100 | _aMark J. Jackson | ||
| 245 | 0 | _aMicrofabrication and Nanomanufacturing | |
| 260 |
_aBoca Raton _bTaylor and Francis _c2006 |
||
| 300 | _a401p | ||
| 504 | _aMark J. Jackson: Microfabrication and Nanomanufacturing. Boca Raton. Taylor and Francis, 2006. 0-8247-2431-3--(621.9JAC) | ||
| 546 | _aENGLISH | ||
| 942 | _cBK | ||
| 999 |
_c47411 _d47411 |
||